400 kVA Dynamic Voltage Restorer for MPCVD Diamond Growth
Shanghai Wenzheng Electric Co., Ltd., the manufacturer of Winzpower Dynamic Voltage Restorers, designed and manufactured a 400 kVA DVR for an MPCVD single-crystal diamond production line operated by Shanghai Zhengshi Technology Co., Ltd. During a 69 ms deep voltage sag, the three-phase grid voltage fell to only 10%–13% of nominal. The DVR completed compensation in approximately 2 ms and maintained the load-side voltage at 220 V, allowing all 22 diamond growth systems to continue operating without alarms.
Product information: Winzpower Dynamic Voltage Restorer (DVR)
Project Specifications
| Item | Project Data |
|---|---|
| Application | CVD single-crystal diamond and semiconductor materials |
| Protected equipment | 22 MPCVD diamond growth systems |
| Critical load | Approximately 220 kW, plus auxiliary equipment |
| Power system | Three-phase 380 V; approximately 220 V line-to-neutral |
| DVR capacity | 400 kVA |
| Project model | DVR33400 |
| Support duration | 1 s |
| Installation | January 2021 |
| Compensation response | Approximately 2 ms |
Why the MPCVD Process Required Voltage Sag Protection
The production line uses microwave plasma chemical vapor deposition (MPCVD) systems equipped with 2.45 GHz microwave sources. Each system has a rated power of approximately 10 kW. The microwave power supplies, vacuum systems and process controls operate continuously and can be disrupted by a voltage sag lasting only a few cycles.
Based on the 220 kW process load, auxiliary equipment and site power conditions, Winzpower configured the 400 kVA DVR with 1-second support. The unit was installed on the critical bus to protect the production equipment against deep voltage sags and short-duration power disturbances.
Recorded 69 ms Voltage Sag with 2 ms DVR Response
At 18:18:54 on April 19, 2021, the monitoring system recorded a three-phase voltage sag lasting 69 ms. Grid-side phase-to-neutral voltage dropped to 26 V on phase A and 22 V on phases B and C.
| Phase | Grid-Side Voltage | Residual Voltage | DVR Load-Side Voltage | Load-Side Level |
|---|---|---|---|---|
| A | Grid-Side Voltage: 26 V | Residual Voltage: 13% | DVR Load-Side Voltage: 220 V | Load-Side Level: 100% |
| B | Grid-Side Voltage: 22 V | Residual Voltage: 10% | DVR Load-Side Voltage: 220 V | Load-Side Level: 100% |
| C | Grid-Side Voltage: 22 V | Residual Voltage: 10% | DVR Load-Side Voltage: 220 V | Load-Side Level: 100% |
The upper waveform shows the severely reduced grid-side voltage, while the lower waveform shows the protected load voltage. The Winzpower DVR detected the sag and completed compensation in approximately 2 ms. The load-side three-phase waveform remained intact, and the MPCVD equipment continued operating without alarms or shutdowns.
Project Results
- Maintained 220 V load-side voltage while grid residual voltage fell to 10%–13%.
- Protected 22 MPCVD systems and associated auxiliary loads with a 400 kVA, 1-second DVR configuration.
- Prevented equipment alarms, process interruption and shutdown during the recorded 69 ms event.
- Verified the performance of the Winzpower DVR during a recorded deep voltage sag at the operating site.
About Winzpower
Shanghai Wenzheng Electric Co., Ltd. manufactures Winzpower Dynamic Voltage Restorers for semiconductor materials, precision manufacturing and continuous industrial processes. System voltage, rated capacity, minimum residual voltage and support duration are configured according to the protected load and site conditions.
Related Product
Dynamic Voltage Restorer (DVR): Winzpower DVR systems provide voltage-sag compensation on the low-voltage side of a protected feeder or process transformer, so the protected load is supported through the specified sag depth and support duration.
