Active Harmonic Filter Solution for Ningxia Monocrystalline Silicon Manufacturing Plant
Harmonic Mitigation for Monocrystalline Silicon Manufacturing Plant in Ningxia with Active Harmonic Filters
Project Overview
In 2023, Winzele provided an Active Harmonic Filter (AHF) solution for the Phase II expansion project of Ningxia Zhongjing Semiconductor Co., Ltd, a semiconductor material manufacturer specializing in monocrystalline silicon rods, grinding wafers, polishing wafers, and semiconductor components.
The project was developed for a high-power semiconductor manufacturing facility operated by Zhongjing Technology. The production process includes a large number of nonlinear electrical loads, including monocrystalline silicon furnaces, variable frequency drives, and servo-controlled equipment.
These power electronic devices generate significant harmonic currents, which may cause waveform distortion, additional transformer loading, increased electrical losses, and reduced power quality.
The AHF cabinets were combined with the low-voltage distribution switchgear to provide harmonic compensation within the 2000kVA transformer distribution system.
Customer Requirement
The semiconductor manufacturing process requires a stable and high-quality power supply system.
During operation, multiple nonlinear loads connected to the low-voltage distribution system generated considerable harmonic currents, especially low-order harmonics such as:
- 5th harmonic
- 7th harmonic
- 11th harmonic
- 13th harmonic
The harmonic distortion affected the current waveform quality and increased the harmonic burden on the distribution transformers.
To improve the power quality of the low-voltage system, an Active Harmonic Filter solution was selected for dynamic harmonic compensation.
System Configuration
The harmonic mitigation system was installed for the low-voltage distribution system supplied by 2000kVA transformers.
Transformer and AHF Configuration
| Item | Specification |
|---|---|
| Application | Monocrystalline silicon manufacturing |
| Project Location | Ningxia, China |
| Installation Year | 2023 |
| Transformer Capacity | 2000kVA per transformer |
| Compensation Equipment | Active Harmonic Filter (AHF) |
| AHF Configuration | 2 cabinets per transformer |
| Compensation Capacity | 450A per cabinet |
| Total Compensation Capacity | 900A per transformer |
The AHF system was integrated into the low-voltage distribution system as part of the low-voltage switchgear integration solution for the semiconductor manufacturing facility.
Harmonic Measurement Before and After Compensation
Before harmonic treatment, the electrical system showed significant waveform distortion caused by nonlinear semiconductor manufacturing loads.
Measured results:
| Parameter | Before Compensation | After Compensation |
|---|---|---|
| THDi | 30.41% | 2.98% |
| THDu | 10.81% | 2.48% |
The main harmonic current components were significantly reduced:
| Harmonic Order | Before (A) | After (A) |
|---|---|---|
| 5th | 463.4 | 12.4 |
| 7th | 126.7 | 17.5 |
| 11th | 76.7 | 23.5 |
| 13th | 70.5 | 18.1 |
The pre-compensation test screenshot shows voltage and current waveform distortion caused by the nonlinear semiconductor manufacturing loads.
The post-compensation measurement screenshot verifies the harmonic compensation effect, with the current waveform restored closer to sinusoidal.
The results demonstrate that the AHF system effectively compensated the harmonic currents generated by nonlinear production equipment.
Installation and Commissioning
The AHF cabinets were installed alongside the low-voltage distribution equipment inside the semiconductor manufacturing facility.
The project included:
- AHF cabinet installation
- Low-voltage switchgear integration
- Harmonic measurement before and after commissioning
- System adjustment and performance verification
The commissioning process verified that the compensated current waveform became significantly closer to a sinusoidal waveform.
The AHF cabinet was commissioned and put into operation, providing continuous harmonic compensation for the semiconductor production loads.
The AHF cabinets were combined with the low-voltage distribution switchgear to provide harmonic compensation within the 2000kVA transformer distribution system.
Results Achieved
- Current THD was reduced from 30.41% to 2.98%
- Voltage THD was reduced from 10.81% to 2.48%
- 5th harmonic current was reduced from 463.4A to 12.4A
- The harmonic impact on the 2000kVA transformer system was significantly reduced
The Active Harmonic Filter solution improved the power quality of the semiconductor manufacturing facility and provided a more stable electrical environment for precision production equipment.
A follow-up site inspection recorded the AHF cabinet module and operating status, confirming continued harmonic compensation performance.
Application Value
Semiconductor manufacturing plants contain many power electronic loads, including:
- Silicon crystal growth furnaces
- Variable frequency drives
- Servo systems
- Automated production equipment
For these applications, harmonic control is critical because electrical distortion can increase transformer losses, affect sensitive equipment operation, and reduce overall system reliability.
The Ningxia Zhongjing project demonstrates Winzele’s capability in providing customized power quality solutions for high-power industrial and semiconductor manufacturing applications.
Related Solution
- Harmonic Mitigation Solutions — active harmonic filter solutions for industrial power quality improvement
- Active Harmonic Filter (AHF) — active harmonic filter for dynamic harmonic compensation of nonlinear industrial loads
Related Case Study
- Active Harmonic Filter Retrofit and Capacity Upgrade for a Hong Kong Commercial Building — AHF retrofit and capacity upgrade for a Hong Kong commercial building, with six 150A wall-mounted units (900A total) operating in parallel while retaining the original CT measurement and distribution arrangement
Semiconductor manufacturing harmonic mitigation project — installed 2023.
